The composition and thickness of the oxide formed on commercially pure titanium disks were analyzed after the disks were subjected to one of four surface treatments: (1) cleaning with the initial Brånemark regimen, (2) Brånemark regimen and autoclaving, (3) Brånemark regimen and radiofrequency glow discharge (RFGD) treatment for 5 minutes, and (4) Brånemark regimen and RFGD treatment followed by storage for 30 days. Electron spectroscopy for chemical analysis showed titanium dioxide to be the prominent oxide; no significant differences in the thickness of the oxide layers were found. Keywords: oxide, radiofrequency glow discharge, sterilization, surfaces, titanium