Aim: Evaluation of appropriate models for computer-aided design/computer-aided manufacturing (CAD/CAM) in vitro studies by investigation of different model materials regarding suitability for intraoral scanners and dimensional stability. Materials and methods: A typodont model was prepared to accommodate a 10-unit prosthesis. The model was duplicated using six different materials: class IV die stone (DS), cobalt-chrome molybdenum (CoCrMo), epoxy resin (EPOX), polyurethane (PU), titanium (TI), and zirconia (ZI). An intraoral scanner was used to obtain three scans of each model. Reference datasets were generated using micro-computed tomography (micro-CT). The first scan was compared with the corresponding reference micro-CT dataset to assess its trueness. The precision was measured by comparing all scans within one test group. For the evaluation of dimensional stability, micro-CT was used to generate three-dimensional (3D) datasets of the models at different time intervals over a 6-week period. The models were kept under constant conditions during the study. All datasets were analyzed with software that determined the deviation of two datasets by alignment using a best-fit algorithm. Results: The criterion of trueness was fulfilled by CoCrMo, EPOX, PU, and the typodont model. Scans of CoCrMo and ZI showed the best precision. PU and the typodont model did not meet the requirement of dimensional stability, whereas EPOX and gypsum were stable only for a period of 10 days. Conclusion: The CoCrMo model was the only one that met all the criteria for an appropriate model for CAD/CAM in vitro studies. The other investigated materials either lacked dimensional stability or could not be scanned accurately and reproducibly. Keywords: CAD/CAM, accuracy, digital impression, model materials, in vitro, intraoral scanner